Work

Gray-Scale Lithography for MEMS Applications

Year: 2006

Type: article

Source: Defense Technical Information Center (DTIC)

Authors: Christopher M. Waits, Reza Ghodssi, Madan Dubey

Institution: University of Maryland, College Park

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W340723921

FWCI:

Cites: 2

Cited by:

Related to: 20