Work

Low-dielectric constant materials 3. Materials Research Society symposium proceedings Volume 476

Year: 1997

Type: article

Source: OSTI OAI (U.S. Department of Energy Office of Scientific and Technical Information)

Authors: C. Case, Paul A. Kohl, T. Kikkawa, W.W. Lee

Language: English

Topic: Copper Interconnects and Reliability

Subfield: Electronic, Optical and Magnetic Materials

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W35474233

FWCI: 0.304

Cites: 10

Cited by: 2

Related to: 10