A Novel MEMS Capacitive Microphone with Semiconstrained Diaphragm Supported with Center and Peripheral Backplate Protrusions
Work
Year: 2021
Type: article
Abstract: Audio applications such as mobile phones, hearing aids, true wireless stereo earphones, and Internet of Things devices demand small size, high performance, and reduced cost. Microelectromechanical sys... more
Source: Micromachines
Institution Knowles (United States)
Cites: 27
Cited by: 36
Related to: 10
FWCI: 2.643
Citation percentile (by year/subfield): 76.21
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Sustainable Development Goal Affordable and clean energy
Open Access status: gold
APC paid (est): $2,165