Work

Anomaly Detection in Semiconductor Cleanroom Using Isolation Forest

Year: 2021

Type: conference-paper

Source: International Conference on Information and Communication Technology Convergence (ICTC)

DOI: 10.1109/ictc52510.2021.9621047

Authors: Israt Jahan, Md. Morshed Alam, Md. Faisal Ahmed, Yeong Min Jang

Institutions: Kookmin University, Daffodil International University

Language: English

Topic: Anomaly Detection Techniques and Applications

Subfield: Artificial Intelligence

Field: Computer Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4200516041

FWCI: 0.578

Cites: 10

Cited by: 6

Related to: 10