Epitaxial Growth of CaMnO3–y Films on LaAlO3(112¯0) by Pulsed Direct Current Reactive Magnetron Sputtering
Year: 2022
Type: article
Abstract: CaMnO3 is a perovskite with attractive magnetic and thermoelectric properties. CaMnO3 films are usually grown by pulsed laser deposition or radio frequency magnetron sputtering from ceramic targets. Herein, epitaxial growth of CaMnO3–y (002) films on a ‐oriented LaAlO3 substrate using pulsed direct current reactive magnetron sputtering is demonstrated, which is more suitable for industrial scale depositions. The CaMnO3–y shows growth with a small in‐plane tilt of <≈0.2° toward the (200) plane of CaMnO3–y and the () with respect to the LaAlO3 substrate. X‐ray photoelectron spectroscopy of the electronic core levels shows an oxygen deficiency described by CaMnO2.58 that yields a lower Seebeck coefficient and a higher electrical resistivity when compared to stoichiometric CaMnO3. The LaAlO3 substrate promotes tensile‐strained growth of single crystals. Scanning transmission electron microscopy and electron energy loss spectroscopy reveal antiphase boundaries composed of Ca on Mn sites along <101> and <002>, forming stacking faults.
Institutions: Linköping University, Université de Tours, Centre National de la Recherche Scientifique, Commissariat à l'Énergie Atomique et aux Énergies Alternatives, Institut National des Sciences Appliquées Centre Val de Loire, GREMAN, Matériaux, Microélectronique, Acoustique, Nanotechnologies, Rensselaer Polytechnic Institute
Language: English
Field: Materials Science
Domain: Physical Sciences
Open Access status: hybrid
Estimated APC paid: $3,900
OpenAlex ID: W4205737102