Work

Squeeze Film Damping Effects in a Micromachined Tunneling Accelerometer

Year: 1999

Type: conference-paper

DOI: 10.1115/imece1999-0250

Authors: Mark G. da Silva, Ken Greiner, Cheng-Hsien Liu, Thomas W. Kenny, John R. Gilbert

Institutions: Microcosm (United States), Stanford University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4206451572

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