Sparse Bayesian long short-term memory networks for computationally efficient stochastic modeling of plasma etch processes
Year: 2022
Type: article
Source: Computers & Chemical Engineering
Authors: Damdae Park, Sangwon Ryu, Gon-Ho Kim, Jong Min Lee
Institution: Seoul National University
Language: English
Subfield: Artificial Intelligence
Field: Computer Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4210341893
