Work

A High-Order Membrane Resonator Array For Gravimetric Ammonia Sensing with Sub-Ppm Limit of Detection

Year: 2022

Type: conference-paper

Source: IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

DOI: 10.1109/mems51670.2022.9699741

Authors: Zhenming Liu, Ardalan Lotfi, Mojtaba H. Shamami, Peter J. Hesketh, Farrokh Ayazi

Institution: Georgia Institute of Technology

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Science Foundation

Award: NNCI: Southeastern Nanotechnology Infrastructure Corridor (SENIC)

OpenAlex ID: W4211045222

FWCI: 2.034

Cites: 10

Cited by: 4

Related to: 10