Synergic Impacts of CF 4 Plasma Treatment and Post-thermal Annealing on the Nonvolatile Memory Performance of Charge-Trap-Assisted Memory Thin-Film Transistors Using Al–HfO 2 Charge Trap and In–Ga–Zn–O Active Channel Layers
Year: 2022
Type: article
Source: ACS Applied Electronic Materials
Authors: Jin-Ju Kim, Sung-Min Yoon
Institution: Kyung Hee University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Awards: G2144839285, G7953792572
OpenAlex ID: W4220684145
