Work

Investigation of structural transformation and residual stress under single femtosecond laser pulse irradiation of 4H–SiC

Year: 2022

Type: article

Source: Ceramics International

DOI: 10.1016/j.ceramint.2022.03.063

Authors: Haiyan Shi, Qi Song, Yu Hou, Song Yue, Yan Li, Zhe Zhang, Man Li, Kunpeng Zhang, Zichen Zhang

Institutions: Chinese Academy of Sciences, Institute of Microelectronics, Changchun University of Science and Technology, China Academy of Space Technology

Language: English

Topic: Laser Material Processing Techniques

Subfield: Computational Mechanics

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4220775550

FWCI: 4.83

Cites: 49

Cited by: 49

Related to: 10