Work

Atomic understanding of the densification removal mechanism during chemical mechanical polishing of fused glass

Year: 2022

Type: article

Source: Applied Surface Science

DOI: 10.1016/j.apsusc.2022.153166

Authors: Wei Liu, Song Yuan, Xiaoguang Guo

Institution: Dalian University of Technology

Language: English

Topic: Advanced Surface Polishing Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Natural Science Foundation of China

OpenAlex ID: W4220797035

FWCI: 2.182

Cites: 45

Cited by: 35

Related to: 10