Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets
Year: 1969
Type: article
Source: Physical Review
Author: Peter Sigmund
Institution: Argonne National Laboratory
Language: English
Subfield: Surfaces, Coatings and Films
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4230053467