Work

Strain Evaluation in SiC MEMS Test Structures

Year: 2009

Type: conference-abstract

Source: ECS Meeting Abstracts

DOI: 10.1149/ma2009-02/34/2623

Authors: Matteo Bosi, Giovanni Attolini, Bernard E. Watts, Cesare Frigeri, Francesca Rossi, Antonella Poggi, Alberto Roncaglia, Fulvio Mancarella, Oscar Martinez, Vanesa Hortelano

Institutions: National Research Council, Universidad de Valladolid

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: bronze

OpenAlex ID: W4231586375

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