Work

(Invited) Nano-Precision Deep Reactive Ion Etching of Monocrystalline 4H-SiCOI for Bulk Acoustic Wave Resonators with Ultra-Low Dissipation

Year: 2020

Type: conference-abstract

Source: ECS Meeting Abstracts

DOI: 10.1149/ma2020-01231333mtgabs

Authors: Farrokh Ayazi, Benoit Hamelin, Jeremy Yang

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4233618910

Cites:

Cited by: 1

Related to: 10