Work

MEMS & Sensors

Year: 2008

Type: conference-paper

Source: Digest of technical papers/Digest of technical papers - IEEE International Solid-State Circuits Conference

DOI: 10.1109/isscc.2008.4523313

Authors: Farrokh Ayazi, Christoph Hagleitner

Institutions: Georgia Institute of Technology, IBM Research - Zurich

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4236525535

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