Work

Capacitive vertical silicon bulk acoustic resonator

Year: 2007

Type: article

Source: The Journal of the Acoustical Society of America

DOI: 10.1121/1.2771312

Author: Farrokh Ayazi

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4238525610

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