Work

Microsystems

Year: 2000

Type: article

Source: Measurement and Control

DOI: 10.1177/002029400003300901

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: bronze

OpenAlex ID: W4241535900

FWCI:

Cites:

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Related to: 10