Work

Thermal Decomposition of Tungsten Nitrido Precursors for Low Temperature MOCVD of WNxCy

Year: 2015

Type: conference-abstract

Source: ECS Meeting Abstracts

DOI: 10.1149/ma2015-02/19/882

Authors: Seo Young Kim, Arijit Koley, Richard Bonsu, Michelle Nolan, Lisa McElwee-White, Tim Anderson

Institution: University of Florida

Language: English

Topic: Copper Interconnects and Reliability

Subfield: Electronic, Optical and Magnetic Materials

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4243281545

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