Work

Micro/Nanosystems

Year: 2012

Type: reference-entry

Source: Springer eBooks

DOI: 10.1007/978-90-481-9751-4_100418

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4244043269

Cites:

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Related to: 10