Work

Scanning Probe Lithography

Year: 2008

Type: reference-entry

Source: CRC Press eBooks

DOI: 10.1201/noe0849396397.ch323

Author: Stefan Zauscher

Language: English

Topic: Nanofabrication and Lithography Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4244288623

Cites: 21

Cited by: 1

Related to: 10