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Improving material-specific dispense processes for low-defect coatings

Year: 2011

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.879481

Authors: Nick Brakensiek, Jennifer Braggin, John Berron, Raul Ramirez, Karl Anderson, Brian Smith

Institutions: Brewer Science (United States), Entegris (United States)

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Bhabha Atomic Research Centre

OpenAlex ID: W4244427574

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