Work

Phase-change properties of GeSbTe thin films deposited by plasma-enchanced atomic layer depositon

Year: 2016

Type: dataset

Source: nano Online

DOI: 10.1515/nano.11671_2015.166

Authors: Sannian Song, Dongning Yao, Zhitang Song, Lina Gao, Zhonghua Zhang, Le Li, Lanlan Shen, Liangcai Wu, Bo Liu, Yan Cheng, Songlin Feng

Language: English

Topic: Phase-change materials and chalcogenides

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4244907578

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