Work

Fabrication of Three-Dimensional Metalized Movable Microstructures by the Combination of Two-Photon Microfabrication and Electroless Plating

Year: 2012

Type: article

Abstract: We propose a method to fabricate three-dimensional (3D) metallic movable microparts by the combination of two-photon microfabrication and electroless plating. In this method, polymeric movable microparts with anchors made by two-photon microfabrication are metalized by electroless plating, and then the anchors are removed by laser ablation using a femtosecond pulsed laser. As a result, a metalized freely movable micropart whose motion is restricted to a shaft can be produced. We succeeded in fabricating sophisticated 3D metallic microrotors by adjusting the experimental conditions of both electroless copper plating and laser ablation.

Source: Japanese Journal of Applied Physics

DOI: 10.1143/jjap.51.06fl17

Authors: Takashi Ikegami, Michael P. Stocker, Kathleen Monaco, John T. Fourkas, Shoji Maruo

Institutions: Yokohama National University, University of Maryland, College Park

Language: English

Topic: Nonlinear Optical Materials Studies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: bronze

Funder: Japan Society for the Promotion of Science

Award: Development of flower-shaped bio-micromotors driven by bacteria