Holographic Characterization of Contaminants in CMP Slurries
Year: 2019
Type: conference-abstract
Source: ECS Meeting Abstracts
Authors: Fook Chiong Cheong, Juliana Lumer, Mary Ann Odete, Annmarie Winters, Laura A. Philips
Language: English
Subfield: Atomic and Molecular Physics, and Optics
Field: Physics and Astronomy
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4249900842