Work

Ion Implantation

Year: 1999

Type: other

Source: Inorganic reactions and methods

DOI: 10.1002/9780470145333.ch73

Author: Richard B. Fair

Language: English

Topic: Ion-surface interactions and analysis

Subfield: Computational Mechanics

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4250169352

Cites: 1

Cited by:

Related to: 10