Work

A gas detection system on a single CMOS chip compromising capactive, calorimetric, and mass-sensitive microsensors

Year: 2005

Type: conference-paper

Source: Digest of technical papers/Digest of technical papers - IEEE International Solid-State Circuits Conference

DOI: 10.1109/isscc.2002.992290

Authors: C. Hagleitner, D. Lange, N. Kerness, A. Hierlemann, O. Brand, H. Baltes

Institution: ETH Zurich

Language: English

Topic: Gas Sensing Nanomaterials and Sensors

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4250494979

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