Work

Design Considerations

Year: 2002

Type: book-chapter

Source: Microtechnology and MEMS

DOI: 10.1007/978-3-662-05060-6_2

Authors: D. Lange, O. Brand, H. Baltes

Institutions: Stanford SystemX Alliance, Stanford University, ETH Zurich

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4251705068

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