Microfabrication of 3D silicon MEMS structures using gray-scale lithography and deep reactive ion etching
Year: 2005
Type: article
Source: Sensors and Actuators A Physical
Authors: C WAITS, B MORGAN, M KASTANTIN, R GHODSSI
Institution: University of Maryland, College Park
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4253312979