Year: 2022
Type: conference-paper
Abstract: We report on a new technique to form and seal microfabricated cells that alleviates some of the limitations imposed by current solutions. The technique consists in integrating single-use sealing structures that can be actuated through laser irradiation, either to isolate cavities from each other or to connect them. Inspired by the well-established glass-blowing techniques, it reproduces on a wafer the “make-seal” and “break-seal” features found in conventional cell filling setups. By allowing cells to be evacuated, filled and sealed after having been fully-formed, this technique opens new venues for atomic devices. Here, we demonstrate both features and present one use case where alkali dispensers are used in association with non-noble gasses despite their gettering ability.
Source: HAL
Language: English
Subfield: Atomic and Molecular Physics, and Optics
Field: Physics and Astronomy
Domain: Physical Sciences
Open Access status: green
OpenAlex ID: W4280498132