Smooth polishing with non-linear compensation
Year: 2022
Type: article
Source: Optik
Institution: National University of Defense Technology
Language: English
Subfield: Biomedical Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Awards: G6790937969, 高通量强光元件制造中的纳米损伤前驱体抑制基础研究
OpenAlex ID: W4281250325