Fabrication Strategies of Metal–Ferroelectric–Insulator–Silicon Gate Stacks Using Ferroelectric Hf–Zr–O and High-k HfO2 Insulator Layers for Securing Robust Ferroelectric Memory Characteristics
Year: 2022
Type: article
Source: ACS Applied Electronic Materials
Authors: Jin-Ju Kim, Seung-Eon Moon, Sung-Min Yoon
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Awards: G2144839285, G7874312387, G86039062
OpenAlex ID: W4281291305
