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Advanced Metallization for ULSI Applications

Year: 2022

Type: article

Source: Japanese Journal of Applied Physics

DOI: 10.35848/1347-4065/ac6c14

Language: English

Topic: Copper Interconnects and Reliability

Subfield: Electronic, Optical and Magnetic Materials

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4282048310

FWCI:

Cites:

Cited by: 65

Related to: 10