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Special Section Guest Editorial: Next Generation Light Source, Materials, and Metrology/Inspection Equipment

Year: 2022

Type: editorial

Abstract: Guest Editors Erik Hosler and Brennan Peterson introduce the Special Section on Next Generation Light Source, Materials, and Metrology/Inspection Equipment.

Source: Journal of Micro/Nanopatterning Materials and Metrology

DOI: 10.1117/1.jmm.21.2.021201

Authors: Erik Hosler, Brennan Peterson

Institution: PsiQuantum (United States)

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: bronze

OpenAlex ID: W4283651114

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