Year: 2020
Type: preprint
Abstract: The high flexibility, impermeability and strength of graphene membranes are key properties that can enable the next generation of nanomechanical sensors. However, for capacitive pressure sensors the sensitivity offered by a single suspended graphene membrane is too small to compete with commercial sensors. Here, we realize highly sensitive capacitive pressure sensors consisting of arrays of nearly ten thousand small, freestanding double-layer graphene membranes. We fabricate large arrays of small diameter membranes using a procedure that maintains the superior material and mechanical properties of graphene, even after high-temperature anneals. These sensors are readout using a low cost battery-powered circuit board, with a responsivity of up to 47.8 aF Pa$^{-1}$ mm$^{-2}$, thereby outperforming commercial sensors.
Source: arXiv (Cornell University)
Authors: Šiškins, Makars, Lee, Martin, Wehenkel, Dominique, van Rijn, Richard, de Jong, Tijmen W., Renshof, Johannes R., Hopman, Berend C., Peters, Willemijn S. J. M., Davidovikj, Dejan, van der Zant, Herre S. J., Steeneken, Peter G.
Institution: Delft University of Technology
Language: English
Subfield: Biomedical Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: green
OpenAlex ID: W4287825437