Work

Particle-in-Cell Simulations With Fluid Metastable Atoms in Capacitive Argon Discharges: Electron Elastic Scattering and Plasma Density Profile Transition

Year: 2022

Type: article

Source: IEEE Transactions on Plasma Science

DOI: 10.1109/tps.2022.3174401

Authors: De-Qi Wen, Janez Krek, Jon Tomas Gudmundsson, Emi Kawamura, Michael A. Lieberman, John P. Verboncoeur

Institutions: Michigan State University, University of Iceland, KTH Royal Institute of Technology, University of California, Berkeley

Language: English

Topic: Low-Pressure Plasma Processing and Diagnostics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Science Foundation, Air Force Office of Scientific Research

Awards: G1730580096, G2033117110, G2097156614

OpenAlex ID: W4293195788

FWCI: 1.635

Cites: 41

Cited by: 28

Related to: 10