Work

The Spatial Resolution and Defect Contrast of Optical Beam Induced Reflectance (OBIR) Scans

Year: 1987

Type: conference-paper

Source: Topical Meeting on Lasers in Materials Diagnostics

DOI: 10.1364/lmd.1987.wf2

Authors: G. E. Carver, D. C. Joy

Institution: AT&T (United States)

Language: English

Topic: Integrated Circuits and Semiconductor Failure Analysis

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4321077269

FWCI:

Cites: 12

Cited by:

Related to: 10