Work

Defect detection in silicon by optical beam-induced reflectance

Year: 1986

Type: conference-paper

Source: Annual Meeting Optical Society of America

DOI: 10.1364/oam.1986.me3

Authors: Gary E. Carver, John D. Michalski

Institution: AT&T (United States)

Language: English

Topic: Integrated Circuits and Semiconductor Failure Analysis

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4321264528

FWCI: 1.136

Cites:

Cited by: 1

Related to: 10