Work

CMOS-Embedded 3D Micro/Nanofluidics Employing Top-Down Beol Single-Step Wet-Etching Technique

Year: 2023

Type: conference-paper

Source: Proceedings, IEEE micro electro mechanical systems

DOI: 10.1109/mems49605.2023.10052329

Authors: Wei-Yang Weng, Hung-Yu Hou, Yueh-Jung Chao, Shwu-Jen Liaw, Jun-Chau Chien

Institution: National Taiwan University

Language: English

Topic: Microfluidic and Capillary Electrophoresis Applications

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: Ministry of Education, National Science and Technology Council

OpenAlex ID: W4322731018

FWCI: 1.267

Cites: 9

Cited by: 2

Related to: 10