Work

A thin film force sensor on AISI 5140 steel surface with multilayer SI3N4/AL2O3 film as insulation structure

Year: 2023

Type: article

Source: Thin Solid Films

DOI: 10.1016/j.tsf.2023.139797

Authors: Xuerui Li, Gongqi Yu, Haiping Zhang, Zhen Cao, Wenbo Li, Jiongli Li, Xudong Wang

Institutions: Beijing Institute of Aeronautical Materials, Beijing Graphene Institute

Language: English

Topic: Metal and Thin Film Mechanics

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4323975483

FWCI: 0.334

Cites: 23

Cited by: 3

Related to: 10