Work

Achieving narrow gaps in micro-nano structures fabricated by maskless optical projection lithography

Year: 2023

Type: article

Source: Applied Physics Express

DOI: 10.35848/1882-0786/acc3db

Authors: Xiang-Yang Liu, Xian-Zi Dong, Min Guo, Feng Jin, Tian-Wei Wang, Xuan-Ming Duan, Zhen-Sheng Zhao, Mei-Ling Zheng

Institutions: Chinese Academy of Sciences, Technical Institute of Physics and Chemistry, University of Chinese Academy of Sciences, Jinan University

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Natural Science Foundation of China, National Key Research and Development Program of China

Awards: G5239649174, G5627546675

OpenAlex ID: W4324028834

FWCI: 0.149

Cites: 32

Cited by: 2

Related to: 10