Self-Aligned Contact Doping of WSe2 Metal–Insulator–Semiconductor Field-Effect Transistors Using Hydrogen Silsesquioxane
Year: 2023
Type: article
Source: ACS Applied Electronic Materials
Institutions: Korea University, Seoul National University
Language: English
Subfield: Materials Chemistry
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
Awards: G1332883877, G2572957395, G5442972664
OpenAlex ID: W4362698217
