Work

Molecular Emission Spectroscopy for Diagnostics of Magnetically Enhanced Rf Discharge

Year: 2023

Type: conference-paper

Source: International Thermal Plasma Processes Conference (TPP)

DOI: 10.1615/itppc-1998.620

Authors: S. V. Avtaeva, E. B. Kulumbaev, M. Z. Mamytbekov, D.K. Otorbaev

Language: English

Topic: Low-Pressure Plasma Processing and Diagnostics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4366114810

FWCI:

Cites:

Cited by:

Related to: 10