Work

A Low-Voltage Wideband AlN-on-Si Gyroscope With Sub 10-DPH Bias Instability Mode Matched Using Laser Trimming

Year: 2023

Type: conference-paper

Source: IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)

DOI: 10.1109/inertial56358.2023.10104003

Authors: Zhenming Liu, Haoran Wen, Farrokh Ayazi

Institution: Georgia Institute of Technology

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4366978611

FWCI: 3.613

Cites: 10

Cited by: 6

Related to: 10