Work

Fully Integrated High-Frequency MEMS and CMOS Inertial Measurement Systems: Taking a Journey from Silicon to Silicon Carbide

Year: 2023

Type: conference-paper

Source: IEEE/ION Position Location and Navigation Symposium

DOI: 10.1109/plans53410.2023.10139948

Authors: Farrokh Ayazi, Haoran Wen, Gregory Junek, Zhenming Liu, Chris Heaton

Institution: Georgia Institute of Technology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4379876700

FWCI: 0.976

Cites: 25

Cited by: 2

Related to: 10