A Review of Eigenmode and Frequency Control in Piezoelectric MEMS Resonators
Year: 2023
Type: article
Authors: Zhenming Liu, Farrokh Ayazi
Institution: Georgia Institute of Technology
Language: English
Subfield: Biomedical Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funder: Army Research Laboratory
OpenAlex ID: W4379983194