Work

3D-Printed, Non-Planar Electron Sources For Next-Generation Electron Projection Lithography

Year: 2023

Type: conference-paper

Source: International Vacuum Nanoelectronics Conference

DOI: 10.1109/ivnc57695.2023.10188962

Authors: Alex Kachkine, Crystal E. Owens, A. John Hart, Luis F. Velásquez-García

Institution: Massachusetts Institute of Technology

Language: English

Topic: Gyrotron and Vacuum Electronics Research

Subfield: Atomic and Molecular Physics, and Optics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

Funder: European Regional Development Fund

OpenAlex ID: W4385302105

FWCI: 1.617

Cites: 9

Cited by: 1

Related to: 10