Work

Deep reinforcement learning optimized double exponentially weighted moving average controller for chemical mechanical polishing processes

Year: 2023

Type: article

Source: Process Safety and Environmental Protection

DOI: 10.1016/j.cherd.2023.07.049

Authors: Zhu Ma, Tianhong Pan, Jiaqiang Tian

Institution: Anhui University

Language: English

Topic: Advanced Statistical Process Monitoring

Subfield: Statistics, Probability and Uncertainty

Field: Decision Sciences

Domain: Social Sciences

Open Access status: closed

Funder: National Natural Science Foundation of China

Awards: G388326249, G79521971

OpenAlex ID: W4385598111

FWCI: 3.559

Cites: 41

Cited by: 19

Related to: 10