Work

Physicochemical Analysis of Nanoscale Metal Oxide Thin Film Precursors via Infrared Spectroscopic Ellipsometry

Year: 2023

Type: article

Abstract: High Resolution Image Download MS PowerPoint Slide We present a nondestructive and highly sensitive experimental methodology for accurately controlling the chemical pathways of metal oxide formation in ultrathin films (∼10 nm) relevant for electronic devices, such as thin film transistors. Utilizing infrared spectroscopic ellipsometry (IRSE), we shed light on the individual sol–gel precursor conversion stages of In(NO 3 ) 3 and Zn(CH 3 COO) 2 films into In 2 O 3 and ZnO via a thermally induced reaction. Employing IR highly reflective substrates (TiN, Al, and Au), the intrinsic sensitivity of IRSE is enhanced; we present the chemical signatures of precursor byproducts, which are detected down to nanometer-scale thin films. We provide insights into the link between the chemical conversion, the substrate’s reflectivity, and IRSE sensitivity and propose a universal methodology for accurate physicochemical analysis of ultrathin films.

Source: The Journal of Physical Chemistry C

DOI: 10.1021/acs.jpcc.3c01384

Authors: Christina Koutsiaki, Demosthenes C. Koutsogeorgis, Nikolaos Kalfagiannis

Institutions: Nottingham Trent University, University of Ioannina

Language: English

Topic: Optical Polarization and Ellipsometry

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: hybrid

Estimated APC paid: $5,000

Funder: Nottingham Trent University