Work

Experimental Study of Electrical Breakdown in MEMS/NEMS Devices With Deep Submicron Gaps

Year: 2023

Type: article

Source: Journal of Microelectromechanical Systems

DOI: 10.1109/jmems.2023.3299559

Authors: Justin Matthews, Haoran Wen, Farrokh Ayazi

Institution: Georgia Institute of Technology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Army Research Laboratory

Award: G8358761027

OpenAlex ID: W4385656635

FWCI: 0.149

Cites: 16

Cited by: 2

Related to: 10