Year: 2023
Type: preprint
Abstract: UTSOI MOS devices enable the scaling of the channel length of MOS Transistors through scaling of the channel thickness and oxide thickness. Additionally, as they have a planar architecture similar to the conventional Bulk MOSFETs, these UTSOI MOSFETs have a simpler fabrication process compared to 3-D Transistors like FinFETs. Also, their performance can be efficiently tuned by applying a bias through the BOX. This allows a significant dynamic modulation of the speed/power trade-off, which is a powerful knob at the circuit level.
Authors: Nalin Vilochan Mishra, Aditya S Medury
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: gold
OpenAlex ID: W4386356173
